top of page

High-speed damage inspection and vision in the loop on semiconductor equipment

Use case

ITEC produces pick-and-place machines used in semiconductor manufacturing. It specializes in high volume and high speed solutions that can handle extremely small dies of tens of micrometers up to medium sized dies of several millimeters.

All machines pick dies from a wafer, and transfer them onto a substrate with electrical leads. During transfer several inspections are done for quality (scratches, chipping, contamination of the die) as well as process control (alignment, rotation, missing die).

Currently, a frame-based camera is used to determine the die size and position (quality inspection is also optional). This requires a motion stop to avoid blurry pictures, which limits the machine speed to ~10 dies/second.

The next generation pick-and-place machines will be designed at much higher speeds (>100 dies/second). This requires vision inspections without a motion stop. This is being tested at ITEC using an event-based camera. Together with IMEC we are defining and testing the envisioned analysis strategy, which looks quite promising. Next step will be to implement this low-latency edge computing on the Rebecca chip using neuromorphic AI accelerators.

www.imec-int.com
www.itecequipment.com

ACKNOWLEDGMENT: REBECCA project is supported by the Chips Joint Undertaking and its members, including the top-up funding by National Authorities under grant agreement n° 101097224. Funded by the European Union. Views and opinions expressed are however those of the author(s) only and do not necessarily reflect those of the European Union or the granting authority. Neither the European Union nor the granting authority can be held responsible for them.
EN_Co-fundedbytheEU_RGB_WHITE.png
chips_white.png
Logo_white.png
  • X
  • LinkedIn
  • Youtube
bottom of page